4. Measuring and testing
  5. Speed, velocity, or acceleration
  6. Acceleration determination utilizing inertial element

Jerome B. Sohn

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Integrated packaging of micromechanical sensors and...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
Reexamination Certificate

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Micromechanical sensor with a guard band electrode and fabricati

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
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Profile ID: LFUS-PAI-P-1997392

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