4. Semiconductor device manufacturing: process
  5. Making device or circuit responsive to nonelectrical signal
  6. Physical stress responsive

Jennifer Louise Lund

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Low temperature Bi-CMOS compatible process for MEMS RF...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate

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Microswitch with a micro-electromechanical system

Electricity: circuit makers and breakers – Electrostrictive or electrostatic
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Profile ID: LFUS-PAI-P-2251703

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