4. Metal fusion bonding
  5. Process
  6. Diffusion type

Jeff Hart

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Diffusion bonding of copper sputtering targets to backing...

Metal fusion bonding – Process – Diffusion type
Reexamination Certificate

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Diffusion bonding of high purity metals and metal alloys to...

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2617548

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