4. Drying and gas or vapor contact with solids
  5. Material treated by electromagnetic energy

James M. Olivas

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Apparatus for drying batches of disks

Drying and gas or vapor contact with solids – Apparatus – Houses – kilns – and containers
Reexamination Certificate

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Apparatus for drying batches of wafers

Drying and gas or vapor contact with solids – Apparatus – With automatic control
Reexamination Certificate

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Disk drying apparatus and method

Drying and gas or vapor contact with solids – Material treated by electromagnetic energy
Reexamination Certificate

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Wafer drying apparatus and method

Drying and gas or vapor contact with solids – Process – Gas or vapor contact with treated material
Reexamination Certificate

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