4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

James J. Mezey, Sr.

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Methods and apparatus for thermally processing wafers

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Methods and apparatus for thermally processing wafers

Semiconductor device manufacturing: process – Radiation or energy treatment modifying properties of...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2131494

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