4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

James Biddle

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Method and apparatus for detecting that two moveable members...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Method of detecting the position of a wafer

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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Profile ID: LFUS-PAI-P-2675695

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