4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Jae-hyun Lee

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Process chamber used in manufacture of semiconductor device,...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With heating or cooling means for apparatus part other than...
Reexamination Certificate

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Process chamber used in manufacture of semiconductor device,...

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2552208

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