4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

J. David Casey, Jr.

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Apparatus and method for reducing differential sputter rates

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Electron beam processing

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Electron beam processing for mask repair

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Method and apparatus for milling copper interconnects in a...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Method and apparatus for repairing lithography masks using a...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1392173

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