4. Coating processes
  5. Measuring, testing, or indicating
  6. Thickness or uniformity of thickness determined

Itzhak Kelson

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Apparatus and method for in-situ thickness and stoichiometry...

Coating processes – Measuring – testing – or indicating – Thickness or uniformity of thickness determined
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Apparatus for in-situ thickness and stoichiometry...

Radiant energy – Calibration or standardization methods
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