4. Coating apparatus
  5. Gas or vapor deposition

IPS Ltd.

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Apparatus and method for depositing thin film on wafer using...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Apparatus and method for depositing thin film on wafer using...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Apparatus for depositing thin films on semiconductor wafer...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Apparatus for depositing thin films on semiconductor wafers

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Atomic layer deposition (ALD) thin film deposition equipment...

Cleaning and liquid contact with solids – Processes – Hollow work – internal surface treatment
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