4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Infineon Technologies A G

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Method for removal of hard mask used to define noble metal...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Method of forming a vertically oriented device in an...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Method of reducing post-development defects in and around...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Reexamination Certificate

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