4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Igor Bagriy

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Non-contact workpiece holder

Coating apparatus – Work holders – or handling devices
Reexamination Certificate

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Plasma processing methods and apparatus

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Plasma processing methods and apparatus

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2071031

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