4. Semiconductor device manufacturing: process
  5. With measuring or testing

Ian Dudley

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Algorithm for detecting sloped contact holes using a...

Active solid-state devices (e.g. – transistors – solid-state diode – Test or calibration structure
Reexamination Certificate

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Method for detecting sloped contact holes using a...

Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate

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System and method for constructing a profile of a structure...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2096002

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