4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Hungyueh Lu

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Dry clean method instead of traditional wet clean after...

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate

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Post-cleaning method of a via etching process

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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