4. Etching a substrate: processes
  5. Nongaseous phase etching of substrate

Hsiao Shih-Yi

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Method for wet etching of high k thin film at low temperature

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
Reexamination Certificate

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Puddle etching method of thin film by using spin-processor

Etching a substrate: processes – Nongaseous phase etching of substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2724861

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