4. Coating apparatus
  5. Gas or vapor deposition

Hongbee Teoh

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Ceramic substrate support

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Showerhead assembly for a processing chamber

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With gas inlet structure
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2550525

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