4. Semiconductor device manufacturing: process
  5. Making device or circuit emissive of nonelectrical signal
  6. Including integrally formed optical element

Hong Hie Lee

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Method for forming a mask pattern

Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Including integrally formed optical element
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Method for forming a micro-pattern on a substrate

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask resist contains organic compound
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2781424

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