4. Active solid-state devices (e.g., transistors, solid-state diode
  5. Field effect device
  6. Responsive to non-optical, non-electrical signal

Ho-suk Kim

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High-vacuum packaged microgyroscope and method for...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
Reexamination Certificate

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High-vacuum packaged microgyroscope and method for...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Responsive to non-optical – non-electrical signal
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2593382

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