4. Electric resistance heating devices
  5. Heating devices
  6. Radiant heater

Hisashi Nomura

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Heat treatment of semiconductor wafers where upper heater direct

Electric resistance heating devices – Heating devices – Radiant heater
Patent

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Method for manufacturing semiconductor device

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Method for manufacturing semiconductor device, substrate...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Diffusing a dopant
Reexamination Certificate

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Profile ID: LFUS-PAI-P-931131

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