4. Optics: measuring and testing
  5. Inspection of flaws or impurities

Hiromi Nagahama

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Silicon wafer cleaning method

Cleaning and liquid contact with solids – Processes – Using sequentially applied treating agents
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Surface inspection apparatus and surface inspection method

Optics: measuring and testing – Inspection of flaws or impurities
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Surface inspection apparatus and surface inspection method

Optics: measuring and testing – Inspection of flaws or impurities
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2401562

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