4. Thermal measuring and testing
  5. Temperature measurement
  6. In spaced noncontact relationship to specimen

Hiroji Tsujimura

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Measuring apparatus provided with an automatic focussing device

Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
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Method for measuring surface temperature of semiconductor wafer

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Pyrometer

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Pyrometer

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Profile ID: LFUS-PAI-P-483408

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