4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Hideki Matsumura

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Method and apparatus for depositing a thin film, and...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Method and apparatus for depositing a thin film, and...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2519920

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