4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Henry L. Grohman

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Ion beam deposition targets having an interlocking interface...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Sputtering target

Machines not elsewhere specified – Heat treatment – welding or brazing
Design Patent

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Profile ID: LFUS-PAI-P-2785515

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