4. Coating apparatus
  5. Gas or vapor deposition

Heng-Yi Tseng

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Apparatus and method for positioning gas injectors in a...

Heating – Work chamber having heating means – Having means by which work is progressed or moved mechanically
Reexamination Certificate

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Apparatus for evacuating a process chamber

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Wafer boat having improved wafer holding capability

Material or article handling – Process
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2092340

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