4. Semiconductor device manufacturing: process
  5. Making device or circuit responsive to nonelectrical signal
  6. Physical stress responsive

Helmut Skapa

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Method for fabricating a micromechanical component

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate

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Method of producing acceleration sensors

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Nonstick layer for a micromechanical component

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1257598

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