4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron probe type

Heinrich Spiecker

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Array for achromatic imaging of a pulsed particle beam

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Beam splitter device or laser-scanning microscope

Optical: systems and elements – Single channel simultaneously to or from plural channels – By partial reflection at beam splitting or combining surface
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Readout method performed by stripe scanning planar objects...

Radiant energy – Luminophor irradiation – Methods
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Profile ID: LFUS-PAI-P-2722304

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