4. Radiation imagery chemistry: process, composition, or product th
  5. Radiation modifying product or process of making
  6. Radiation mask

Harald Emmerich

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Alignment method for multi-level deep x-ray lithography utilizin

Radiation imagery chemistry: process – composition – or product th – Registration or layout process other than color proofing
Patent

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Micromechanical cap structure and the respective...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Reexamination Certificate

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Micromechanical magnetic field sensor

Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Lumped type parameters
Reexamination Certificate

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Micromechanical spin angular acceleration sensor

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate

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Radiation mask adapted to be aligned with a photoresist layer an

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Patent

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Profile ID: LFUS-PAI-P-1126010

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