4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Gundolf Wenger

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In-situ mask technique for producing III-V semiconductor...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Masking method for producing semiconductor components,...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method for the in-situ fabrication of DFB lasers

Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2576275

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