4. Radiant energy
  5. Radiant energy generation and sources
  6. With radiation modifying member

Gregory M. Shimkaveg

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Capillary discharge extreme ultraviolet lamp source for EUV micr

Radiant energy – Radiant energy generation and sources – With radiation modifying member
Patent

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Pixel array arrangement for a soft x-ray source

X-ray or gamma ray systems or devices – Source – Electron tube
Reexamination Certificate

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System and method for non-destructive decontamination of...

X-ray or gamma ray systems or devices – Specific application – Absorption
Reexamination Certificate

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Profile ID: LFUS-PAI-P-905544

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