4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Granville D Lee, Jr.

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Controlling an etching process of multiple layers based upon...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method for increasing inductance of on-chip inductors and...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Reactor for processing a semiconductor wafer

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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