4. Material or article handling
  5. Apparatus for moving material between zones having different...
  6. For carrying standarized mechanical interface type

Gerd Ickes

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Process for the loading and unloading of an evacuatable treatmen

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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Vacuum treatment apparatus for deposition of thin layers on...

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1841755

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