4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Etching inorganic substrate

Frieder Sundermeier

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Micromechanical mass flow sensor and method for the...

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Micromechanical structural element having a diaphragm and...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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