4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Frank O. Uher

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Contactor assembly for testing electrical circuits

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate

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Contactor assembly for testing electrical circuits

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate

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Film uniformity by selective pressure gradient control

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Purge gas in wafer coating area selection

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Profile ID: LFUS-PAI-P-698992

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