4. X-ray or gamma ray systems or devices
  5. Specific application
  6. Lithography

Frank Eisert

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Method of manufacturing an optical element

Abrading – Precision device or process - or with condition responsive... – By optical sensor
Reexamination Certificate

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Substrate material for X-ray optical components

X-ray or gamma ray systems or devices – Specific application – Lithography
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2950888

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