4. Coating apparatus
  5. Immersion or work-confined pool type
  6. Floating film or layer of coating material

Frank A. Grunfeld

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Barrier mechanism for isolating drive chain from active chamber

Coating apparatus – Immersion or work-confined pool type – Floating film or layer of coating material
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Thin film deposition

Coating apparatus – Control means responsive to a randomly occurring sensed... – Temperature responsive
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Profile ID: LFUS-PAI-P-652759

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