Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
Inventor
active
Method for producing NiTiHf alloy films by sputtering
Methods of treating electrodes and gas sensors comprising...
Process for deposition of sputtered shape memory alloy films
Production of binary shape-memory alloy films by sputtering...
Production of ternary shape-memory alloy films by sputtering...
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