4. Semiconductor device manufacturing: process
  5. With measuring or testing
  6. Optical characteristic sensed

Fedor Nikolaevich Dultsev

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Apparatus and method for determining porosity

Measuring and testing – With fluid pressure – Porosity or permeability
Reexamination Certificate

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Apparatus and method for determining porosity

Semiconductor device manufacturing: process – With measuring or testing – Optical characteristic sensed
Reexamination Certificate

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Method and apparatus for characterization of porous films

Measuring and testing – With fluid pressure – Porosity or permeability
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2123232

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