4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Fandayani Soesilo

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In situ and ex situ hardmask process for STI with oxide...

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means
Reexamination Certificate

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In situ and ex situ hardmask process for STI with oxide...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2013027

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