4. Optics: measuring and testing
  5. By light interference
  6. For dimensional measurement

Fahrettin L. Degertekin

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Methods of imaging in probe microscopy

Measuring and testing – Surface and cutting edge testing – Roughness
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Microinterferometer for distance measurements

Optics: measuring and testing – By light interference – For dimensional measurement
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Microinterferometer for measuring distance with improved...

Optics: measuring and testing – By light interference – Having wavefront division
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System and method for surface profiling a target object

Optics: measuring and testing – By light interference – For dimensional measurement
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