4. Radiant energy
  5. Ion generation
  6. Field ionization type

Evgeny V. Shun'ko

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Direct current gas-discharge ion-beam source with quadrupole...

Radiant energy – Ion generation – Field ionization type
Reexamination Certificate

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Inductive RF plasma source with external discharge bridge

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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Process for structural modification of surfaces by treatment...

Radiant energy – Electrically neutral molecular or atomic beam devices and...
Reexamination Certificate

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RF loaded line type capacitive plasma source for broad range...

Radiant energy – Irradiation of objects or material
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Profile ID: LFUS-PAI-P-2021679

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