4. Active solid-state devices (e.g., transistors, solid-state diode
  5. Responsive to non-electrical signal
  6. Physical deformation

Eric Stadler

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Deformable mirror

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Reexamination Certificate

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Miniature electrostatic actuation device and installation...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2778143

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