4. Coating apparatus
  5. Gas or vapor deposition

Ellie Yieh

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Accelerated plasma clean

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate

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Accelerated plasma clean

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate

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BPSG reflow method to reduce thermal budget for next...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Cleaning process end point determination using throttle...

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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CVD plasma assisted lower dielectric constant sicoh film

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Profile ID: LFUS-PAI-P-200507

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