4. Coating processes
  5. Coating by vapor, gas, or smoke
  6. Metal coating

Elaine Pao

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Chemical vapor deposition of ruthenium films for metal...

Coating processes – Coating by vapor – gas – or smoke – Metal coating
Reexamination Certificate

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CVD ruthenium seed for CVD ruthenium deposition

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Profile ID: LFUS-PAI-P-2519379

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