4. Single-crystal, oriented-crystal, and epitaxy growth processes;
  5. Forming from vapor or gaseous state

Egbert Woelk

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Method of depositing germanium-containing films

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate
Reexamination Certificate

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Organometallic compounds

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state
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