4. Electrical generator or motor structure
  5. Non-dynamoelectric
  6. Thermal or pyromagnetic

Edward Hill

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Articulated MEMS electrostatic rotary actuator

Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate

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In-plane MEMS thermal actuator and associated fabrication...

Electrical generator or motor structure – Non-dynamoelectric – Thermal or pyromagnetic
Reexamination Certificate

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Methods of fabricating in-plane MEMS thermal actuators

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Thermally responsive
Reexamination Certificate

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Methods of overplating surfaces of microelectromechanical...

Electrolysis: processes – compositions used therein – and methods – Electrolytic coating – Involving measuring – analyzing – or testing
Reexamination Certificate

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Temperature compensated microelectromechanical structures...

Electrical generator or motor structure – Non-dynamoelectric – Thermal or pyromagnetic
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2054180

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