4. Semiconductor device manufacturing: process
  5. Introduction of conductivity modifying dopant into...
  6. Diffusing a dopant

Donald W. Rakowski

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Ion implanter in-situ mass spectrometer

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Method for introducing dopants into semiconductor devices...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Diffusing a dopant
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Method using disposable and permanent films for diffusion...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Methods using disposable and permanent films for diffusion...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Micro heating of selective regions

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
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Profile ID: LFUS-PAI-P-2127156

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