4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with the removal of material by nonchemical means

Dirk C. Jordan

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Method and apparatus for preparing nitride semiconductor...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Method of removing an amorphous oxide from a monocrystalline...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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