4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Irradiating, ion implanting, alloying, diffusing, or...

Dennis J. Rieger

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Method for dry etching of transition metals

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...
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Silica substrate or portion formed from oxidation of...

Chemistry of inorganic compounds – Silicon or compound thereof – Oxygen containing
Reexamination Certificate

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Profile ID: LFUS-PAI-P-903840

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