4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

David Jay Rose

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Apparatus and method for selectively restricting process...

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
Reexamination Certificate

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Apparatus and method for selectivity restricting process...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method and apparatus for restricting process fluid flow...

Etching a substrate: processes – Gas phase etching of substrate
Reexamination Certificate

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Method and apparatus for restricting process fluid flow...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With gas inlet structure
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2438853

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