4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

David E. Steuber

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Annealing process for low-k dielectric film

Coating processes – With post-treatment of coating or coating material – Heating or drying
Reexamination Certificate

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Apparatus and method for controlling erosion profile in...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Apparatus and method for controlling plasma uniformity...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Barrier accumulation-mode MOSFET

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Burnishing tape handling apparatus and method

Abrading – Abrading process – Side face of disk
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2010549

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